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[Case Study] RTP (Rapid Thermal Process)

This is a case study of RTP using light sources for light heating from Ushio, a company with tradition and a wealth of achievements. In the past, semiconductor thermal processing commonly used furnaces (insulated), but for nano-order devices, thin film formation and shallow junctions are required, making RTP, synonymous with isothermal processes, a key technology. Additionally, in next-generation semiconductors, flash lamp annealing has become the mainstream technology as a thermal flux technique. ● For other functions and details, please contact us.

Company：ウシオ電機
Price：Other

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[Case Study] Insulation and Heating of Liquids

This is an introduction to examples of liquid heating and temperature maintenance using light sources from Ushio, a company with a tradition and a wealth of achievements. 【Features】 ○ Capable of maintaining temperature and humidity for pure water and chemical solutions used in the cleaning of silicon wafers in semiconductor manufacturing lines and glass substrates in LCD manufacturing lines. ○ Composed of halogen lamps covered with high-quality quartz glass, resulting in minimal contamination from impurities and the ability to heat efficiently with an efficiency of over 95%. ● For other functions and details, please contact us.